Monday, March 22, 2010

Re: Shutdown p5000etch SNF 2010-03-20 10:21:39: Working on robot alignment...

Were releasing all three chamber, but will leave it at yellow
status for now, still need to address the robot extension
problem. The wafer on pocket blade position is repeatable
i'm not seeing the wafer rotating on the pokcet after the
adjustement and fixing the load lock isolation problem.

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