I had the same problem today as I did yesterday. Ran two test wafers through with resist on top of 1.1um thermal oxide for 120sec etches. Worked fine.
Ran different wafer than yesterday but with the same stack of resist on top of 1.9um LTO on top of 1.9um LSN. I shortened the etch time to 120sec from longer etch time. Still got wafer did not drop on blade error.
I conclude I can only run these wafers when there is staff standing there to fish them out.
Wafer is in loadlock chamber on the blade but not being sensed.
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