Dear Labmembers:
It has been brought to our attention that some people need to be reminded of the policies on dedicated cassettes:
1. No litho cassettes may be taken into the white area of the lab. This includes the metal boats as well as the teflon cassettes with brown buttons.
2. No Furnace preclean or etch cassettes from clean or semiclean stations may be taken into the Litho area of the lab. This includes metal cassettes.
3. To move wafers between the white and litho areas of the lab, use your own transfer cassettes.
4. If you remove a dedicated cassette from a station (for example, from wbdiff to a furnace for loading) return it as soon as possible.
These policies are covered in wet bench training at all these stations. If you need a refresher, refer to the training materials in the website (procedures on the wiki, video at http://spf.stanford.edu/training/wbdiff.wmv.) If everyone is diligent about proper cassette use, the cleanliness in the lab can be better maintained and there should be sufficient cassettes for everyone's use. If you see someone improperly using dedicated cassettes, you have every right to correct that person. You may also report to staff (please provide specific details.)
Thanks for your attention --
Your SNF Staff
It has been brought to our attention that some people need to be reminded of the policies on dedicated cassettes:
1. No litho cassettes may be taken into the white area of the lab. This includes the metal boats as well as the teflon cassettes with brown buttons.
2. No Furnace preclean or etch cassettes from clean or semiclean stations may be taken into the Litho area of the lab. This includes metal cassettes.
3. To move wafers between the white and litho areas of the lab, use your own transfer cassettes.
4. If you remove a dedicated cassette from a station (for example, from wbdiff to a furnace for loading) return it as soon as possible.
These policies are covered in wet bench training at all these stations. If you need a refresher, refer to the training materials in the website (procedures on the wiki, video at http://spf.stanford.edu/training/wbdiff.wmv.) If everyone is diligent about proper cassette use, the cleanliness in the lab can be better maintained and there should be sufficient cassettes for everyone's use. If you see someone improperly using dedicated cassettes, you have every right to correct that person. You may also report to staff (please provide specific details.)
Thanks for your attention --
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
No comments:
Post a Comment