P5000 Email Log
Monday, March 1, 2010
Comment p5000etch SNF 2010-03-01 18:27:07: ch.B wafer position
After getting several Helium leak rate errors for ChB, noticed that the clamp marks suggest the wafers are shifted towards the flat by about 3-4mm, this may be enough to cause a leak?
No comments:
Post a Comment
‹
›
Home
View web version
No comments:
Post a Comment