Au etch rate

Hi,

Does anyone know the approximate etch rate for thick gold film using the standard Au etch solution?

 

Thanks,

Arash

 

 

 

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Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall,

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi