Shutdown p5000etch SNF 2010-02-26 15:38:10: there are some errors

WAFER DID NOT DROP ON BLADE.
One wafer has been already done, and six wafers haven't yet.
therefore, seven wafers are left in the chamber.
No resist is coated on every wafer.
contact to: ksaruta@stanford.edu / 650-814-6898