Comment p5000etch SNF 2010-02-25 18:25:19: Ch. B etch rate low for first wafer

Jim Ox, 1min, LTO400PC densified at 1000C for 1hr
Wafer 1: 118nm/min
Wafer 2: 379 nm/min
Wafer 3: 373 nm/min
Wafer 4: 379 nm/min
It appears this chamber needs to be seasoned? Maybe its due to it being opened for maintinence recently.