Comment p5000etch SNF 2010-02-04 17:40:00: CH. B clamp alarm

recipe: JIM-OX with 20sec, 50W Ar step added
5 seasoning wafers went through 60sec main etch without problems.
6 product wafers went through 600sec main etch. 3 out of 6 wafers ended up with "Wafer did not drop on Blade" alarm.