About RT KOH etch

Hi All,

 

Does anybody have any experience or recipes for KOH (45%) etch of silicon at room temp (etch rate, oxide etch rate and etc.)? Or any alternative of slow silicon etching?

 

I want to etch ~50nm of silicon.

 

Thank you so much!

 

Best,

Pengyu

 

2010-02-23

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fanpy839