Monday, January 11, 2010

Shutdown p5000etch SNF 2010-01-11 18:56:16: Ch.B wafer didn't drop

after recipe ended, wafer didn't drop on robot arm. arm is still in the chamber along with the wafer. two other wafers are in the elevator. please don't use the manual robot commands to retrieve the wafer as that has broken many wafers in the past and this is a fairly expensive/important wafer. the three test wafers all ran without issue before the tool decided to drop the first real wafer. I left a box for the wafers by the tool.

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