Nima Ghalichechian from FormFactor Inc is giving a talk one week from
now. Please see below for details.
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Tuesday, Feb 2, 2010
Allen 101X 4:00–5:00pm
Design, Fabrication, and Characterization of a Rotary Micromotor
Supported on Microball Bearings
Nima Ghalichechian, Ph.D.
Senior Principal MEMS Engineer, FormFactor Inc.
Abstract: The design, fabrication, and characterization of a rotary
micromotor supported on microball bearings developed at the University
of Maryland will be presented. This has been the first demonstration of
a rotary micromachine with a robust mechanical support provided by
microball-bearing technology. One key challenge in the realization of a
reliable micromachine is the development of a bearing that would result
in high stability, low friction, and high resistance to wear. A
six-phase, rotary, bottom-drive, variable-capacitance micromotor is
designed, simulated, and fabricated on silicon using benzocyclobutene
low-k dielectric films. A characterization methodology is developed to
measure and extract the angular displacement, velocity, acceleration,
torque, mechanical power, coefficient of friction, and frictional force
through non-contact techniques. A top angular velocity of 517 rpm
corresponding to the linear tip velocity of 324 mm/s is measured.
Measurement of the transient response of the rotor indicated that the
torque is 5.62+/-0.5 micro N-m. Such a rotary micromotor can be used in
developing micropumps which are highly demanded microsystems for fuel
delivery, drug delivery, cooling, and vacuum applications. Examples of
successful applications of this work will be presented.
Bio: Nima Ghalichechian received his Ph.D. in Electrical Engineering
from University of Maryland in 2007. At the MEMS Sensors and Actuators
Lab, he successfully developed rotary and linear electrostatic
micromotors supported on microball bearings. For his Master's research,
Nima developed new MEMS fabrication processes to fabricate an
electrostatic micromotor and performed metal-polymer adhesion and
interface studies. He received his Master's degree in May 2005 with
thesis titled "Integration of Benzocyclobutene Polymers and Silicon
Micromachined Structures Fabricated with Anisotropic Wet Etching". Since
2007, he has been with the MEMS R&D Department at FormFactor Inc,
Livermore, CA where he is involved with design, fabrication, and testing
of the microsprings for advanced wafer-level probe cards.
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