Re: Shutdown p5000etch SNF 2010-01-14 14:53:42: Wafer stuck in B

Ran 4 wafers using the user's recipe (Jim-ntr , 1800 sec etch) without any problems after increasing the "declamp" step (Argon plasma) from 10 sec to 30 sec.
I will leave the chamber B offline until we optimize the declamp step.