RE: Question about gold etching

If you bake resist (1165) and treat your features with au-etch, the rate is ~150nm/min. you can dip it in and out to visually see too. Make sure you rebake in hot plate (~1min at 110C) if you take it out to re-harden resist. It doesn’t etch si/sio2.

gluck

 

Best Regards,

Sonny !

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"What makes the desert beautiful," said the Little Prince ,"is that somewhere it hides a well ."

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Sonny Vo

Ph.d candidate

Department of Applied Physics, Stanford University

(626) 202-8379

Harris Research Group: http://snow.stanford.edu/index.html

 

 

 

From: fanpy839 [mailto:fanpy839@stanford.edu]
Sent: Thursday, January 21, 2010 3:35 PM
To: labmembers
Subject: Question about gold etching

 

Hi Everyone,

 

I'm wondering if there is anyone have used the gold etchant in the lab (NaI), and could give me some information about its etching rate of gold and how it may attack silicon, oxide, resist (e.g. PMMA) and etc.

 

Thank you so much for your help!

 

Best,

Pengyu

 

2010-01-21

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fanpy839