I received a call from work control reporting a Toxic Gas
Alarm. When I arrived, I found all gas cabinets to the fab have been
shut down. There also appears a number of other shutdowns, I don't
understand. As a result I am leaving all the gases off until I have
an understanding of the events.
So, until further notice no gases are available. These include the
epi, dry etch and furnace gases.
Sorry for the inconvenience.
Regards,
Ed
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