Wafer got stuck on blade (not sensed and a tiny bit crooked) coming out of 150sec etch in Ch. B. I had set pump time to 600s for all of my Ch. B etches as I have thick LTO, LSN stack on backside of wafer, and know that the capactive sensing can get unhappy.
Also was experiencing inablity of wafer in #1 (bottom) slot of cassette A to be loaded in, and when it looked for wafer in #2 slot it scratch my wafer in #1 slot on its topside. Pretty darn sure cassette was properly seated, retried having a labmate try his look, and still had handling issues. SOLUTION USED: I placed my wafer in #25 (topmost) slot of cassette.
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