Re: Comment p5000etch SNF 2009-11-18 09:16:33: Ch.C is down for He flow

Adjusted the He cooling bypass flow. Now when He press is set at 4 Torr, He flow is about 9 sccm (was 0.1 sccm). @ 8 Torr, He flow ~ 20 sccm. Ran 20 wafer through both Ch.C and Ch.B with no problems.