Re: Problem p5000etch SNF 2009-09-17 06:45:27: wafer missing in CH. B or loadlock

Vented the chamber and recovered the user's wafer. Reduced the allowable He leak rate before alarming from 6 sccm to 3 sccm. Cycled 8 wafrs using the Jim Ox recipe. Leak rates were < 1 sccm.