Comment p5000etch SNF 2009-09-24 17:18:55: CH B qual after CHF3 change out

New vendor.
Etch rate Ox = 3131A/min
ER PR = 1605
ER Nitride = 3032
Selectivity Ox : Nitride = 1.03 : 1
Sel Ox:PR = 1.95 : 1
Sel SiN : PR = 1.89 : 1