Re: Comment p5000etch SNF 2009-07-20 17:16:03: Backside He

Ch.B - Removed wafer pieces from the electrode and wet cleaned the chamber. Ran several wafers with no problems. He leak rate is < 1 sccm @ 8 Torr.
Ch.A - He leak rate @ 8 Torr is 3.5 sccm