Sunday, July 19, 2009

Problem p5000etch SNF 2009-07-19 18:23:13: He rate high

It looks like it's happened again!
It looks like the high helium rate was "fixed" by lowering the
Helium pressure to 4T.
This happened a year ago, and trashed a bunch of people's wafers, and I thought after that it was clear that this is not an acceptable "fix".

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