Delamination problem with Pd

I am using Pd in my process (~360A evaporated with Innotec) for S/D fingers and probing pads, I can get a clean lift off however probing the pads almost destroys them as they seem to come off very easily even with a tiny scratch from the probe tips. Due to the nature of these devices I have to use Pd directly on the surface. I would appreciate if anyone has a solution for this issue.

 

 

Thanks,

Arash

 

 

 

 

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Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall,

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi