New Coral features .... runtime data charts.

SNF Lab Members:

We have just released a new version of Coral that has two main differences of note:

1. Based on inputs from Nancy, Maurice, Raja, and Mary, we have added collection of runtime data for tylanbpsg, tylanpoly, tylannitride, and teos2.

2. We have also added the ability to search for and plot existing runtime data.  Obviously, that only works for the tools for which we are or have been collecting runtime data ... and at this point, the bulk of the data is for tylan oxidation furnaces 1-4.

Let me tell you a bit more about the use of this feature.  If you have a tool selected in the equipment tree for which you would like to see runtime data, you can select the "Display run data" menu item from the "Process Actions" menu.

When you do that, you will see a window that looks like:



For the Tylan furnaces, there are a handful of processes, but you will find the most data under the Furnace Qualification process.  If you select that, you will see the search window that looks like:



By default, this will search over a time period of 90 days in the past .... but you can alter the dates which will be examined. The only thing that you have to select, however, is the "Run data to display" field.

For example, if we select "Location #3 (wafer center) thickness", we get a plot that looks like:



This plot shows you the center wafer thickness of each of the 4 wafers in each of the 4 runs that have occurred between the two search dates.

Alternatively, if you determine that you wish to plot "Location #3 (wafer center) thickness mean" you get the following Box and Whisker plot that includes the min and max values (the extent of the "whiskers", the mean (the dot), the median (the black horizontal bar), and the first and third quartile values (the bottom and top of the green box, respectively) for the the center point of all wafers in each of the four applicable runs in that time window.



Finally, if you select to plot "Wafer mean" you get a box and whisker plot for each wafer in each data set that will look like that includes the statistics for all 9 points on each of the 4 wafers in each of the 4 runs that occurred during the time window:



There are a number of features that you will find on these plots.  For example, there are tool tips that show specific data values if you hold your cursor over the data.  If you right click when your mouse is over the plot, you will find that you can print the plot, save it as a PNG (portable network graphics) file, change labels, colors, etc.

Bill has done a nice job of automatically determining what sort of plot makes sense based on the type of data that you are plotting without asking you what kind of plot you want to see.  I am hopeful that you will find these charts and the data that they contain to be of use to you.

If you have questions or comments related to the use of this tool you are welcome to send email either to me directly or to coral@snf.stanford.edu.

Thank you for your continued support.

John