P5000 Email Log
Tuesday, February 10, 2009
Comment p5000etch SNF 2009-02-10 13:41:57: HBr update
Pressure decay test was good. Now panel is pressurized with HBr. The cylinder valve and the valve to the tool are still closed. We will monitor both the pressure and gas sensor over night. If everything is OK , we will turn HBr on by 10 am tomorrow.
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