P5000 Email Log
Wednesday, November 12, 2008
Re: Shutdown p5000etch SNF 2008-11-11 11:32:00: Wafer stuck in slit valve - precarious position
Recovered the user's wafer and placed in his wafer container. Cycled 24 wafers using Ch.B Timed recipe with no problems. Will continue to cycle wafers.
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