Recovered user's wafer. Adjusted backside He flow. Also found the electromagnet power supply's circuit breaker was turned off. Turned circuit breaker on. Also adjusted the cassette height.
Ran 36 wafers using the Ch.B oxide recipe with no problems.
Do not use cassette slots 17 - 25. Still has problem with wafer being dragged out. Need further adjustements but slot 1-16 are OK to run.
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