Unable to run a chamber leak rate yesterday because the turbo backing pump had a high base pressure. The turbo backing was also leaking through. Also found the pump purge not functioning.
- We changed the pump oil. Now base pressure ~ 50 mT
- We cleaned the tubo isolation valve. Now able to isolate the chamber from the pump.
- Still need to repair the pump purge.
Initial leak up rate was very high at ~ 86 mT/min (should be < 5 mT/min).
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