Monday, September 29, 2008

Ti etch at wbmetal

Hi,

Does anyone know the etch rate of Ti in the 5:1:1 H2O:H2O2:NH4OH bath at
wbmetal? Also, what's the selectivity to photoresist (3612) and Si? If
there's an easier wet etch to use, that info would be helpful, too.

Thank you,
John

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