Re: Shutdown p5000etch SNF 2008-09-19 11:11:17: Needs a qual

Qual completed.
Etch rate of ox = 3507A/min
Etch rate of resist = 2262A/min
Selectivity = SiO2:PR = 1.6:1
However, the ox uniformity top tp bottom is quite bad- 20%.
The uniformity is much worse, so I can't reccommend swapping the quartz for vespel.