Power has been restored following the replacement of one of the main
800A circuit breakers. As of 11:45 many of the affected tools are back
on and their shutdowns have been cleared.
There are a handful of tools that have cryopumps that will need a full
regeneration that will take several hours .... that will include the
ebeam, metalica, and innotec. A few of the other tools that need
vacuum, including sts, ald, stsetch2, and matrix should be up shortly
after lunch.
Please contact me if you see tools other than these that have not yet
been returned to service.
Thank you for your continued support,
John
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