Comment p5000etch SNF 2008-09-23 14:24:20: CH B qual after shower head clean

Ox etch rate = 3532A/min
PR etch rate = 2230A/min
Ox:PR selectivity = 1.6:1
Uniformity +/- 6.4%
Top to bottom uniformity = ~10%
Much better than when clamp materials first swapped.