P5000 Email Log
Tuesday, September 23, 2008
Comment p5000etch SNF 2008-09-23 09:11:50: Update Ch.A particles
Wet cleaned the chamber. Cleaned the showerhead. Ran 4 wafer using the Ch.A metal recipe with no problems.
No comments:
Post a Comment
‹
›
Home
View web version
No comments:
Post a Comment