Problem I believe is caused by air in the HX coolant line which causes the coolant pressure to vary. When the pressure gets too low , the flow sensor trips and shuts off the HX. If the pressure is adjusted too high, the pump starter over current sensor trips.
We drained the coolant line and refilled. Also adjusted the coolant pressure at 80C. HX has been on for 4 hours, pressure has been steady at ~ 38 psi. We will continue to monitor. Also please check the HX screen before processing your wafers.
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