Re: Comment p5000etch SNF 2008-07-03 12:08:40: Cycling wafers

Cycled 34 wafers through Ch.A with no problems
Cycled 8 wafers through Ch. B with no problems
Cycled 8 wafers through Ch.C-- 5 wafers faulted for high back side He flow. Possible that my wafers are getting dirty or Ch.C has something on the chuck.