I was using Ch C std etch. The robot picked the wafer and was transferring it to Ch C. Then "Encoder error 209, encoder pulses on ROBOT EXTENSION Axis, Canoot Complete - ROBOT EXTENSION position is not known" message popped up in red.
At the moment, Ch C monitor etch screen says "Waiting for blade exit" as well as the red error message described above.
I'll try to find someone whocan fix it. If you are able to take the wafer out (it has a piece stuck with kapton tape) please send me an email at kocabas@stanford.edu. I will be in the e-beam room until 9pm today (June 30, Monday), too.
The system is yellow lighted, and Ch C is off until the wafer can be taken out.
Ekin
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