nstalled the clear lid on chamber A so that I can observe the wafer handling while its under vacuum. Noticed the wafer lift moved up a little faster in vacuum. Adjusted the lift speed.
After about 150 wafers, had a problem with the wafer sliding on the platten during clamping. Added 5 steps to wafer insertion into the chamber. Cycled about 8 wafers with no problems. Two users are currently running the system.
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