Placed system back online.
A frequent cause of a chamber going offline is a mismatch of the Serial Sequence recipe and the Wafer Process recipe. For example, on the System Control Screen, if the Serial Sequence selected is "C only" and under the Wafer Process no recipe is selected for chamber C. Chamber C would automatically be taken offline as soon as the wafer(s) are loaded.
Please verify that you have a recipe selected for the chamber that you specified under the Serial Sequence heading.
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