Monday, May 5, 2008

Re: Comment p5000etch SNF 2008-05-05 10:16:13: Reliability check

Ran 80 wafers through Ch.A using "Ch.A metal" recipe (30 sec main etch) and 33 wafer through Ch.B "Jim Ox" recipe (30 sec) with no problems.
at

No comments:

Post a Comment