Monday, April 28, 2008

Re: Comment p5000etch SNF 2008-04-25 14:57:24: Update

Ch. C is up -Ran 12 wafers on Ch.C with no problem.
Ch. B is up but unable to run electro-magnets at > 55 gauss. Ran 24 wafers (Ch.B Timed recipe @ 55 gauss) with no problems. Next step is to swap the chamber magnet's power supply. If the problem goes away, we will order a new power supply
Ch.A is DOWN- The wafer lift sensor problem is back. The plan is to replace a chamber interconnect cable.

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