Thursday, April 10, 2008

Platinum etchant

Hi all,
Does anyone know if there is a platinum etchant in SNF?
I googled and people used to make solution with 7HCl:1HNO3:8H2O at 60
deg.
Is there pre-mixed etchant? Also I'm wondering whether the etchant
could remove oxide underneath the platinum which should be avoided.
Please let me know best process for patterning platinum rather than
lift-off.
Thanks.

Cheers,
Joongsun

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