P5000 Email Log
Tuesday, April 29, 2008
Comment p5000etch SNF 2008-04-29 14:57:36: Ch.B magnet current fault
Try running the magnet at 55 gauss or less. Cycled 24 wafers yesterday at 55 gauss with no problems. At > 59 gauss, the system faulted for the low magnet current.
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