tylan: oxidation at T between 950 and 1000?

Hello all:
I was wondering if anyone could describe the use of any of the Tylan
recipes that would allow me to oxidize Si at a "non-standard"
temperature, specifically one between 950 and 1000ºC. I found a
recipe called "DRY3TEMP", which looks like it might do what I want it
to, but I wanted to ask you all if anyone could describe their
experience with such a recipe.

Thanks,
Alex

Alex R. Guichard
Ph.D Candidate
Dept. of Mat. Sci. and Eng.
Stanford University
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