Sunday, March 9, 2008

litho nanospec has bulb out, nanospec next to drytek2 out of spec

The nanospec in the litho area has a burnt out bulb.
The nanospec next to drytek 2 seems to be out of spec.
I and another user have measured using the new nanospec in the litho
room which measures values more to our expected specs: 4300A and 5300A
respectively.
The nanospec next to drytek2 measures ~300A less.
Just a heads up to people who are using this machine to take measurements.

Il Woong

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