P5000 Email Log
Tuesday, February 5, 2008
Re: Comment p5000etch SNF 2008-01-31 14:37:19: Ch.C down for handling.
Adjusted slit to opening speed. Ran 60 wafers straight with no problems. Ch.C OK to run in Auto.
No comments:
Post a Comment
‹
›
Home
View web version
No comments:
Post a Comment