Comment p5000etch SNF 2008-02-25 01:32:59: Ch B operational

AMAT reported that all three chambers should be operational.
I didn't qualify all three chambers. All three chambers should beaccepting wafers.
I processed wafers in Ch.B.
There is still a helium leak in Ch. B. ~3sccm.
I got some PR burning, but running non-standard wafers. If you think you might be sensitive to this, run some tests first.