When I started giving one wafer into LL,
Robot was stuck when it picked up the wafer.
I followed the procedure in the manual and robot returned
back to LL. However, it seems robot lost its position and
couldn't go to home position.
The errors which I saw are:
(1)Encorder error
(2)Cannot go to elevator slot with wafer
(3)Cannot return wafer on vacuum chack until robot is homed
(4)Storage position is not known.
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