Wednesday, December 5, 2007

Re: Shutdown p5000etch SNF 2007-11-30 17:40:05: Wafer stuck while unloading

Repaired broken wire on ribbon for rotation/extension
and replaced bad solenoid for i/o door (open) imtermittenly
does not close. Also, repaired broken wire for chamber
C slit door not open sensor. Chamber is is shutdown
missing 24v , 2amp fuse on chamber interface module
is opened, i will change it tommorow.

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