P5000 Email Log
Thursday, December 13, 2007
Problem p5000etch SNF 2007-12-13 01:23:17: wafers stuck
The handler is stuck in Chamber B. 1 wafer in the chamber and 5 wafers on the elevator. I am not red-lighting in case someone can fix it before the morning.
No comments:
Post a Comment
‹
›
Home
View web version
No comments:
Post a Comment