The bottom line is the that the system is runable with maintenance assistance.
Ch.B- Replaced pin lip seals. Now leak rate is less than 0.5 sccm. Ran 8 wafers with no chamber problems.
Loadlock I/O door- The pneumatic cylinders that actuate the i/O door works intermittently but will need to be replaced. The door opens fine but most of the time , it fails when it tries to close. The door can be pushed close and the system will continue to run until it needs to close again when it goes into standby.
We will order new pneumatic cylinders tomorrow but in the mean time, the system can only be run with maintenance assistance because of the inherent danger of closing the I/O door manually.
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