Robot Extension position unknown when loading wafer into chC.
I noticed several errors: Robot extension unknown. Slit valve doesn;t open in time. Wafer not centered on chuck (clamping way off center, probably due to robot extension error). Wafer dropped from robot on unloading.
I don't know if the issues are present for loading into ch A or Ch B, but C seems completely unusable. Try A or B with extreme caution.
Probably your encoder is bad on the extension motor. Unfortunately the motor/encoder is a completely integrated unit so the motor needs to be replaced. We rebuild/refurbish P5000 robots and have a exchange program. We'd be glad to help if we can assist.
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