Tuesday, December 16, 2008

Problem p5000etch SNF 2008-12-16 04:13:26: wafer stuck in Chamber C

Robot extension position not known error: got my wafers out in the exchange chamber but 1 dummy is stuck in Ch. C.
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1 comment:

  1. NeoGuruJune 17, 2009 at 11:11 PM

    What did you do to resolve this? I am guessing that the encoder was bad and you replaced the extension motor? We rebuild/refurbish P5000 robots and have an exchange program if you need help in the future.

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